Key Metrics
CiteScore 

6.7
Impact Factor 

< 5
Scite Index 

0.94 5-Year SI

SJR 

Q1Mechanical Engineering

SNIP 

1.06
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Topics Covered on Materials Science in Semiconductor Processing
Materials Science in Semiconductor Processing Journal Specifications
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| Overview | |
| Publisher | ELSEVIER SCI LTD |
| Language | English |
| Frequency | Monthly |
| General Details | |
| Language | English |
| Frequency | Monthly |
| Publication Start Year | 1998 |
| Publisher URL | Visit website |
| Website URL | Visit website |
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