Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films : Impact Factor & More
eISSN: 1520-8559pISSN: 0734-2101
Share this on:
Key Metrics
CiteScore 
4.4
SNIP
0.99
Recommended pre-submission checks
Powered by 
Run standard language and technical checks to improve your manuscript – before you submit
Technical Compliance
Ensure manuscript complies with standard submission guidelines.
Language Quality
Improve clarity, grammar, and academic writing style.
A comprehensive report covering all these checks awaits you.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films Journal Specifications
| Overview | |
| Publisher | A V S AMER INST PHYSICS |
| Language | English |
| Frequency | Bi-monthly |
| General Details |
View less
Planning to publish in Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films ?
Upload your Manuscript to get
- Degree of match
- Common matching concepts
- Additional journal recommendations
Recently Published Papers in Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Structure evolution and properties of Ni films deposited by RF magnetron sputtering with and without H2-assistance
- 28 May 2026
- Journal of Vacuum Science & Technology A
Effect of Ti buffer layer on stress and time evolution characteristics of boron carbide thin films
- 11 May 2026
- Journal of Vacuum Science & Technology A
Temperature and reactant-driven growth pathways of ruthenium nanofilms on H-terminated Si(100): Insights from nanoscale characterization and machine learning
- 5 May 2026
- Journal of Vacuum Science & Technology A
Preparation and thermal stability of Mo/AlMoONH/AlMoONL/AlxOy solar selective absorption coatings
- 5 May 2026
- Journal of Vacuum Science & Technology A
Effect of scanning speed on microstructure and wear resistance of AlFeNb0.5NiTi high-entropy alloy coatings by laser cladding
- 27 Apr 2026
- Journal of Vacuum Science & Technology A
Adsorption-controlled epitaxy and twin control of <i>γ</i> -GaSe on GaAs (111)B
- 27 Apr 2026
- Journal of Vacuum Science & Technology A
Structure evolution and properties of Ni films deposited by RF magnetron sputtering with and without H2-assistance
- 28 May 2026
- Journal of Vacuum Science & Technology A
Effect of Ti buffer layer on stress and time evolution characteristics of boron carbide thin films
- 11 May 2026
- Journal of Vacuum Science & Technology A
Temperature and reactant-driven growth pathways of ruthenium nanofilms on H-terminated Si(100): Insights from nanoscale characterization and machine learning
- 5 May 2026
- Journal of Vacuum Science & Technology A
Preparation and thermal stability of Mo/AlMoONH/AlMoONL/AlxOy solar selective absorption coatings
- 5 May 2026
- Journal of Vacuum Science & Technology A
Effect of scanning speed on microstructure and wear resistance of AlFeNb0.5NiTi high-entropy alloy coatings by laser cladding
- 27 Apr 2026
- Journal of Vacuum Science & Technology A
Adsorption-controlled epitaxy and twin control of <i>γ</i> -GaSe on GaAs (111)B
- 27 Apr 2026
- Journal of Vacuum Science & Technology A
FAQs on Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
How long has Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films been actively publishing? 
What is the publishing frequency of Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films?
How many articles did Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films publish last year?
What is the eISSN & pISSN for Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films?
What is Citescore for Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films?
What is SNIP score for Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films?
Who is the publisher of Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films?
