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JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3 : Impact Factor & More

eISSN: 2708-8340pISSN: 1932-5150

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JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3 Journal Specifications

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Overview
Publisher SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
Language English
Frequency Quarterly
General Details
LanguageEnglish
FrequencyQuarterly
Publication Start Year2007
Publisher URLVisit website
Website URLVisit website
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Recently Published Papers in JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

Relating human and AI-based detection limits in scanning electron microscopy dimensional metrology
  • 1 Jan 2025
  • Journal of micro/nanolithography, MEMS, and MOEMS : JM3
Resolution enhancement with source-wavelength optimization according to illumination angle in optical lithography
  • 20 Nov 2020
  • Journal of Micro/Nanolithography, MEMS, and MOEMS
Rayleigh or Abbe? Origin and naming of the resolution formula of microlithography
  • 6 Nov 2020
  • Journal of Micro/Nanolithography, MEMS, and MOEMS
Relating human and AI-based detection limits in scanning electron microscopy dimensional metrology
  • 1 Jan 2025
  • Journal of micro/nanolithography, MEMS, and MOEMS : JM3
Resolution enhancement with source-wavelength optimization according to illumination angle in optical lithography
  • 20 Nov 2020
  • Journal of Micro/Nanolithography, MEMS, and MOEMS
Rayleigh or Abbe? Origin and naming of the resolution formula of microlithography
  • 6 Nov 2020
  • Journal of Micro/Nanolithography, MEMS, and MOEMS
View all papers for this journal

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