JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3 : Impact Factor & More
eISSN: 2708-8340pISSN: 1932-5150
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JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3 Journal Specifications
Indexed in the following public directories
Web of Science 
Inspec
| Overview | |
| Publisher | SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS |
| Language | English |
| Frequency | Quarterly |
| General Details | |
| Language | English |
| Frequency | Quarterly |
| Publication Start Year | 2007 |
| Publisher URL | Visit website |
| Website URL | Visit website |
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Recently Published Papers in JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
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Particle and pattern discriminant freeze-cleaning method
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Perspectives and tradeoffs of absorber materials for high NA EUV lithography
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Resolution enhancement with source-wavelength optimization according to illumination angle in optical lithography
- 20 Nov 2020
- Journal of Micro/Nanolithography, MEMS, and MOEMS
Rayleigh or Abbe? Origin and naming of the resolution formula of microlithography
- 6 Nov 2020
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Direct comparison of line edge roughness measurements by SEM and a metrological tilting-atomic force microscopy for reference metrology
- 23 Oct 2020
- Journal of Micro/Nanolithography, MEMS, and MOEMS
JM3 is Gone, Long Live JM3!
- 20 Oct 2020
- Journal of Micro/Nanolithography, MEMS, and MOEMS
Particle and pattern discriminant freeze-cleaning method
- 6 Oct 2020
- Journal of Micro/Nanolithography, MEMS, and MOEMS
Perspectives and tradeoffs of absorber materials for high NA EUV lithography
- 1 Oct 2020
- Journal of Micro/Nanolithography, MEMS, and MOEMS
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