IEEE Transactions on Semiconductor Manufacturing : Impact Factor & More
eISSN: 1558-2345pISSN: 0894-6507
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Aims and Scope of IEEE Transactions on Semiconductor Manufacturing
The IEEE Transactions on Semiconductor Manufacturing is a quarterly peer-reviewed scientific journal published by the IEEE. It covers research on semiconductor device fabrication, including simulation and modeling from the factory to the detailed process level, defect control, yield analysis and optimization, production planning and scheduling, environmental issues in semiconductor manufacturing, and manufacturability improvement. The editor-in-chief is Reha Uzsoy (North Carolina State University). According to the Journal Citation Reports, the journal has a 2020 impact factor of 2.874. Less
Key Metrics
CiteScore 
5.8
H-Index
73
Impact Factor
< 5
SJR
Q1Condensed Matter Physics
SNIP
1.43
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Topics Covered on IEEE Transactions on Semiconductor Manufacturing
IEEE Transactions on Semiconductor Manufacturing Journal Specifications
| Overview | |
| Publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC |
| Language | English |
| Frequency | Quarterly |
| General Details |
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Recently Published Papers in IEEE Transactions on Semiconductor Manufacturing
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- 1 Nov 2025
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Improving Endpoint Detection Sensitivity in Plasma Etching With Small Openings
- 1 Aug 2025
- IEEE Transactions on Semiconductor Manufacturing
MXenes as a Tool to Control p-Type Conductivity in ZnO Thin Film
- 1 Aug 2025
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- 1 Aug 2025
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