IEEE Transactions on Semiconductor Manufacturing : Impact Factor & More
eISSN: 1558-2345pISSN: 0894-6507
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Aims and Scope of IEEE Transactions on Semiconductor Manufacturing
The IEEE Transactions on Semiconductor Manufacturing is a quarterly peer-reviewed scientific journal published by the IEEE. It covers research on semiconductor device fabrication, including simulation and modeling from the factory to the detailed process level, defect control, yield analysis and optimization, production planning and scheduling, environmental issues in semiconductor manufacturing, and manufacturability improvement. The editor-in-chief is Reha Uzsoy (North Carolina State University). According to the Journal Citation Reports, the journal has a 2020 impact factor of 2.874. Less
Key Metrics
CiteScore 
5.8
H-Index
73
Impact Factor
< 5
SJR
Q1Condensed Matter Physics
SNIP
1.43
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Topics Covered on IEEE Transactions on Semiconductor Manufacturing
IEEE Transactions on Semiconductor Manufacturing Journal Specifications
| Overview | |
| Publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC |
| Language | English |
| Frequency | Quarterly |
| General Details |
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Recently Published Papers in IEEE Transactions on Semiconductor Manufacturing
The First and Fastest Automated Fab
- 1 Feb 2026
- IEEE Transactions on Semiconductor Manufacturing
Data-Driven Endpoint Detection for Small Open Area Etching Using Interpretable Transfer Learning
- 1 Feb 2026
- IEEE Transactions on Semiconductor Manufacturing
Scalable Multi-Site Test Architecture for Chiplet-Based Systems on ATE Platforms
- 1 Feb 2026
- IEEE Transactions on Semiconductor Manufacturing
Feasibility Demonstration of GaN on Si Process for R&D and Manufacturing on Existing 200mm Si-Fab
- 1 Feb 2026
- IEEE Transactions on Semiconductor Manufacturing
Reinforcement Learning-Optimized Adaptive LESO for Disturbance Rejection in Magnetically Suspended Turbo Molecular Pumps
- 1 Feb 2026
- IEEE Transactions on Semiconductor Manufacturing
Modeling and Scheduling of Dual-Arm Cluster Tools With Multifunctional Process Modules
- 1 Feb 2026
- IEEE Transactions on Semiconductor Manufacturing
The First and Fastest Automated Fab
- 1 Feb 2026
- IEEE Transactions on Semiconductor Manufacturing
Data-Driven Endpoint Detection for Small Open Area Etching Using Interpretable Transfer Learning
- 1 Feb 2026
- IEEE Transactions on Semiconductor Manufacturing
Scalable Multi-Site Test Architecture for Chiplet-Based Systems on ATE Platforms
- 1 Feb 2026
- IEEE Transactions on Semiconductor Manufacturing
Feasibility Demonstration of GaN on Si Process for R&D and Manufacturing on Existing 200mm Si-Fab
- 1 Feb 2026
- IEEE Transactions on Semiconductor Manufacturing
Reinforcement Learning-Optimized Adaptive LESO for Disturbance Rejection in Magnetically Suspended Turbo Molecular Pumps
- 1 Feb 2026
- IEEE Transactions on Semiconductor Manufacturing
Modeling and Scheduling of Dual-Arm Cluster Tools With Multifunctional Process Modules
- 1 Feb 2026
- IEEE Transactions on Semiconductor Manufacturing
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