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Impact Factor
Impact Factor
Impact factor of a journal is calculated by dividing the number of current year citations to the source items published in that journal during the previous two years.
Indexed in the following public directories
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Journal Specifications
| Overview | |
| Publisher | SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS |
| Language | English |
| Frequency | Quarterly |
| General Details | |
| Language | English |
| Frequency | Quarterly |
| Publication Start Year | 2007 |
| Publisher URL | Visit website |
| Website URL | Visit website |
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Check my PaperRecently Published Papers
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Full paper
Resolution enhancement with source-wavelength optimization according to illumination angle in optical lithography
- 20 Nov 20
- Journal of Micro/Nanolithography, MEMS, and MOEMS
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Full paper
Rayleigh or Abbe? Origin and naming of the resolution formula of microlithography
- 6 Nov 20
- Journal of Micro/Nanolithography, MEMS, and MOEMS
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Full paper
Direct comparison of line edge roughness measurements by SEM and a metrological tilting-atomic force microscopy for reference metrology
- 23 Oct 20
- Journal of Micro/Nanolithography, MEMS, and MOEMS
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Full paper
JM3 is Gone, Long Live JM3!
- 20 Oct 20
- Journal of Micro/Nanolithography, MEMS, and MOEMS
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Full paper
Particle and pattern discriminant freeze-cleaning method
- 6 Oct 20
- Journal of Micro/Nanolithography, MEMS, and MOEMS
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Full paper
Perspectives and tradeoffs of absorber materials for high NA EUV lithography
- 1 Oct 20
- Journal of Micro/Nanolithography, MEMS, and MOEMS
Scite analysis
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261 articles received 723 citations see all
- 14 Supporting
- 707 Mentioning
- 2 Contrasting
Editorial notices
- 0 Retractions
- 0 Withdrawals
- 0 Corrections
- 0 Errata
- 0 Expression of Concern
FAQs
How long has JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3 been actively publishing?
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3 has been in operation since 2007 till date.
What is the publishing frequency of JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3 ?
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3 published with a Quarterly frequency.
How many articles did JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3 publish last years ?
In 2025, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3 published articles.
What is the eISSN & pISSN for JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3 ?
For JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3,eISSN is 2708-8340 and pISSN is1932-5150.
Who is the publisher of JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3 ?
SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS is the publisher of JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3.