Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
eISSN: 1520-8559
pISSN: 0734-2101
Key Metrics
1.8
CiteScore
CiteScore
CiteScore measures average citations received per document published in the serial.
100
H index
H-Index
Journal's h-index reflects the collective citation impact of the authors publishing in the journal. The h-index is defined as the maximum value of h such that the given journal has published at least h papers that have each been cited at least h times.
0.95
5-Year SI
5-year SI
- N/A 2-year SI
- 0.92 Lifetime SI
Scite Index
Scite Index
scite Index is the ratio of citations supporting research which is published in the journal to sum of citations either supporting or contrasting the research published in the journal for the same time period. Minimum 100 supporting citations required.
0.8
SNIP
SNIP
Source Normalized Impact per Paper measures actual citations received relative to citations expected for the serial’s subject field.
Indexed in the following public directories
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CrossRef -
Scopus -
Web of Science
Topics Covered
- Indium
- Density functional theory
- Material properties
- Atomic layer deposition
- X-ray photoelectron spectroscopy
- Refractive index
- Optical emission spectroscopy
- Monolayer
- Phase transition
- Indium tin oxide
- Growth inhibition
- Microwave plasma chemical vapor deposition
- Titanium
- Room temperature
- Deposition process
- Chemical deposition
- Ultraviolet
- Remote plasma
- Single crystal
- Auger electron spectroscopy
Journal Specifications
Overview
- Publisher A V S AMER INST PHYSICS
- Language English
- Frequency Bi-monthly
General Details
- Language English
- Frequency Bi-monthly
- Publication Start Year 1983
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Check my PaperRecently Published Papers
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Full paper
First principles study on the lattice thermal conductivity of α-phase Ga<sub>2</sub>O<sub>3</sub>
- 1 Sep 22
- Journal of Vacuum Science & Technology A
-
Full paper
Adsorption and surface reaction of isopropyl alcohol on SiO<sub>2</sub> surfaces
- 1 Sep 22
- Journal of Vacuum Science & Technology A
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Full paper
Substrate temperature dependence of GaN film deposited on sapphire substrate by high-density convergent plasma sputtering device
- 1 Sep 22
- Journal of Vacuum Science & Technology A
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Full paper
Deposition-last lithographically defined epitaxial complex oxide devices on Si(100)
- 1 Sep 22
- Journal of Vacuum Science & Technology A
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Full paper
Effect of fabrication processes before atomic layer deposition on β-Ga<sub>2</sub>O<sub>3</sub>/HfO<sub>2</sub>/Cr/Au metal–oxide–semiconductor capacitors
- 1 Sep 22
- Journal of Vacuum Science & Technology A
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Full paper
Ultraviolet photo-enhanced atomic layer deposition for improving dielectric properties of low temperature deposited Al<sub>2</sub>O<sub>3</sub>
- 1 Jul 22
- Journal of Vacuum Science & Technology A
Scite analysis
Powered by scite_
16.8k articles received 87.1k citations see all
- 4,409 Supporting
- 81,415 Mentioning
- 360 Contrasting
Editorial notices
- 2 Retractions
- 0 Withdrawals
- 1 Corrections
- 63 Errata
- 0 Expression of Concern
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FAQs
How long has Journal of Vacuum Science & Technology A Vacuum Surfaces and Films been actively publishing?
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films has been in operation since 1983 till date.
What is the publishing frequency of Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ?
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films published with a Bi-monthly frequency.
How many articles did Journal of Vacuum Science & Technology A Vacuum Surfaces and Films publish last years ?
In 2021, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films published 514 articles.
What is the eISSN & pISSN for Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ?
For Journal of Vacuum Science & Technology A Vacuum Surfaces and Films,eISSN is 1520-8559 and pISSN is0734-2101.
What is Citescore for Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ?
Citescore for Journal of Vacuum Science & Technology A Vacuum Surfaces and Films is 1.8.
What is H index for Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ?
H index for Journal of Vacuum Science & Technology A Vacuum Surfaces and Films is 100.
What is SNIP score for Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ?
SNIP score for Journal of Vacuum Science & Technology A Vacuum Surfaces and Films is 0.8.
What is the SJR for Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ?
SJR for Journal of Vacuum Science & Technology A Vacuum Surfaces and Films is 0.55.
Who is the publisher of Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ?
A V S AMER INST PHYSICS is the publisher of Journal of Vacuum Science & Technology A Vacuum Surfaces and Films.