Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
eISSN: 1520-8559
pISSN: 0734-2101
Key Metrics
4.4
CiteScore
CiteScore
CiteScore measures average citations received per document published in the serial.
0.95
5-Year SI
5-year SI
- N/A 2-year SI
- 0.93 Lifetime SI
Scite Index
Scite Index
scite Index is the ratio of citations supporting research which is published in the journal to sum of citations either supporting or contrasting the research published in the journal for the same time period. Minimum 100 supporting citations required.
0.99
SNIP
SNIP
Source Normalized Impact per Paper measures actual citations received relative to citations expected for the serial’s subject field.
Journal Specifications
| Overview | |
| Publisher | A V S AMER INST PHYSICS |
| Language | English |
| Frequency | Bi-monthly |
| General Details | |
| Language | English |
| Frequency | Bi-monthly |
| Publication Start Year | 1983 |
| Website URL | Visit website |
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Check my PaperRecently Published Papers
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Full paper
Comparison of Al- and Hf-based hybrid photoresists grown by molecular layer deposition for extreme ultraviolet lithography
- 8 Nov 24
- Journal of Vacuum Science & Technology A
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Full paper
Probing trade-off between critical size and velocity in cold-pray: An atomistic simulation
- 5 Nov 24
- Journal of Vacuum Science & Technology A
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Full paper
Electron temperature and ion density distribution on a vertical section in a weakly magnetized inductively coupled plasma
- 5 Nov 24
- Journal of Vacuum Science & Technology A
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Full paper
Dynamic global model of Cl2/Ar plasmas: Applicability to atomic layer etching processes
- 1 Nov 24
- Journal of Vacuum Science & Technology A
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Full paper
Investigation of arc spot splitting behavior on aluminum, titanium, and their alloy cathodes under different gas flows
- 31 Oct 24
- Journal of Vacuum Science & Technology A
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Full paper
Effect of deformation temperature on the microstructure and texture evolution of Ti-6Al-4Zr-2Mo-6V alloy
- 30 Oct 24
- Journal of Vacuum Science & Technology A
Scite analysis
Powered by scite_
17.5k articles received 142.2k citations see all
- 7,564 Supporting
- 132,953 Mentioning
- 554 Contrasting
Editorial notices
- 2 Retractions
- 0 Withdrawals
- 75 Corrections
- 67 Errata
- 0 Expression of Concern
FAQs
How long has Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films been actively publishing?
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films has been in operation since 1983 till date.
What is the publishing frequency of Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films ?
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films published with a Bi-monthly frequency.
How many articles did Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films publish last years ?
In 2023, Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films published 328 articles.
What is the eISSN & pISSN for Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films ?
For Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films,eISSN is 1520-8559 and pISSN is0734-2101.
What is Citescore for Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films ?
Citescore for Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films is 4.4.
What is SNIP score for Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films ?
SNIP score for Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films is 0.99.
Who is the publisher of Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films ?
A V S AMER INST PHYSICS is the publisher of Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.